Electron Microscopy Programs/Projects in the Semiconductor and Dimensional Metrology Division

Physical Measurement Laboratory (PML)

Semiconductor & Dimensional Metrology Division
Dr. David G. Seiler, Chief

General Information:
Lori A. Guariglia, Secretary
301-975-2054 Telephone
301-869-6021 Facsimile

100 Bureau Drive, M/S 8120
Gaithersburg, Maryland 20899-8120