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Microelectronics Device Integration Group

Welcome

More-than-Moore (MtM) technologies are the integration of functions such as sensors and actuators, power electronics, and medical electronics with the integrated circuit. They are embedded in things the public uses every day such as automobiles, smart phones, and home appliances. In the Microelectronics Device Integration Group, we advance measurement science, develop standards, and provide calibrations and reference data for characterizing, testing, and calibrating MtM device technologies. Our personnel and facilities support industrial needs for MEMS wafer and chip-level device testing, calibrations of accelerometers and microphones, SiC power device characterization, and technologies and standards for Smart Grid.

Programs/Projects

MEMS Measurement Science and Standards—The microelectronics revolution, which started in 1947 with the invention of the transistor, is epitomized in Moore's Law, which describes the steady progress in integrating ever larger numbers …

Power Device and Thermal Metrology—The Power Device and Thermal Metrology Project will enable the development, commercialization and utilization of High-Voltage, High-Frequency (HV-HF) power converter technologies that will …

 
Photograph of the NIST Micro Microwave Oven
Contact

Physical Measurement Laboratory (PML)
Semiconductor & Dimensional Metrology Division

Microelectronics Device Integration Group (683.05)
Dr. Michael Gaitan, Leader
301-975-2070 Telephone

General Information:
Terri S. Kroft, Secretary
301-975-2052 Telephone
301-975-5668 Facsimile

100 Bureau Drive, M/S 8120
Gaithersburg, Maryland 20899-8120