> Return to SRD 134, Index of Semiconductor Process Gases
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BORON
TRICHLORIDE
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M.W. [1]
117.169
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N.B.P [2]
285.65 K
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T.P [3]
166.15 K
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BCl3
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Pc [4]
3.87 MPa
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Tc [4]
451.95 K
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Vc [5]
0.1483 m3/kmol
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Note: In the tables, #RED is used for properties obtained from estimation methods. *,† Other colors are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.
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T
K
|
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Vapor Pressure
kPa
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B(T)
cm3·mol-1
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dB/dT·T
cm3·mol-1
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C(T)
cm6·mol-2
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dC/dT·T
cm6·mol-2
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λ
mW/(m·K)
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η
µPa·s
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Estimated
Uncertainty
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1%/†0.1%
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1%
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Gas densities are calculated to better than 0.1% over the temperature and pressure ranges of the reference.
|
10%
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10%
|
|
Reference
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6/†7
|
8
|
7
|
7
|
7
|
7
|
7
|
7
|
|
290
|
†7.45
|
119
|
-780.9
|
1760.5
|
-138842
|
1531523
|
#7.4
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#12.0
|
|
295
|
†7.49
|
141
|
-751.4
|
1685.1
|
-114510
|
1320367
|
#7.5
|
#12.2
|
|
300
|
†7.53
|
166
|
-723.7
|
1614.9
|
-93866
|
1140490
|
#7.7
|
#12.3
|
|
305
|
†7.57
|
195
|
-697.5
|
1549.6
|
-76314
|
986761
|
#7.8
|
#12.5
|
|
310
|
†7.62
|
227
|
-672.8
|
1488.6
|
-61365
|
854979
|
#7.9
|
#12.6
|
|
315
|
†7.66
|
263
|
-649.5
|
1431.6
|
-48611
|
741684
|
#8.1
|
#12.8
|
|
320
|
†7.70
|
303
|
-627.4
|
1378.2
|
-37717
|
644020
|
#8.2
|
#13.0
|
|
340
|
†7.85
|
508
|
-549.5
|
1195.3
|
-7749
|
367768
|
#8.8
|
#13.6
|
|
360
|
†7.99
|
799
|
-485.5
|
1050.6
|
8360
|
208501
|
#9.4
|
#14.2
|
|
380
|
†8.12
|
1195
|
-431.9
|
934.1
|
16889
|
114183
|
#9.9
|
#14.9
|
|
400
|
†8.25
|
1719
|
-386.5
|
838.6
|
21178
|
57261
|
#10.5
|
#15.5
|
|
420
|
†8.36
|
2397
|
-347.5
|
759.1
|
23062
|
22529
|
#11.0
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#16.2
|
|
440
|
†8.46
|
3264
|
-313.8
|
692.2
|
23580
|
1292
|
#11.6
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#16.8
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|
450
|
†8.51
|
3781
|
-298.6
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662.6
|
23524
|
-5958
|
#11.9
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#17.1
|
|
460
|
†8.55
|
-
|
-284.3
|
635.2
|
23329
|
-11574
|
#12.1
|
#17.4
|
|
480
|
*8.66
|
-
|
-258.4
|
586.2
|
22661
|
-19171
|
#12.7
|
#18.1
|
|
500
|
*8.74
|
-
|
-235.3
|
543.6
|
21784
|
-23414
|
#13.3
|
#18.7
|
|
550
|
*8.91
|
-
|
-187.7
|
458.6
|
19357
|
-26247
|
#14.6
|
#20.3
|
|
600
|
*9.05
|
-
|
-150.7
|
395.2
|
17136
|
-24375
|
#16.0
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#21.9
|
|
650
|
*9.17
|
-
|
-121.0
|
346.2
|
15307
|
-21206
|
#17.3
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#23.4
|
|
700
|
*9.26
|
-
|
-96.8
|
307.5
|
13856
|
-17943
|
#18.6
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#25.0
|
|
750
|
*9.34
|
-
|
-76.7
|
276.1
|
12722
|
-14986
|
#19.9
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#26.5
|
|
800
|
*9.41
|
-
|
-59.8
|
250.2
|
11838
|
-12436
|
#21.2
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#28.0
|
|
850
|
*9.47
|
-
|
-45.3
|
228.4
|
11151
|
-10284
|
#22.4
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#29.5
|
|
900
|
*9.52
|
-
|
-32.8
|
210.0
|
10615
|
-8485
|
#23.6
|
#30.9
|
|
950
|
*9.56
|
-
|
-21.8
|
194.1
|
10198
|
-6987
|
#24.8
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#32.3
|
|
1000
|
*9.60
|
-
|
-12.3
|
180.3
|
9872
|
-5739
|
#26.0
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#33.7
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References:
- IUPAC, "Atomic Weights of the Elements 1993," J. Phys. Chem. Ref. Data (1995, 24, 1561).
- "Handbook of Chemistry and Physics," 62nd ed., the Chemical Rubber Co., Cleveland, OH (1981).
- "Predicted by Project Staff at The Pennsylvania State University using either published or internal methods.
- Lynn, Jr., R.E., and Kobe, K.A., "The Critical Properties of Elements and Compounds," Chem. Rev. (1953, 52, 117).
- Matheson Gas Data Book, unabridged ed., Matheson Company, Inc. East Rutherford, NJ (1974, 4 vols.)
- "JANAF Thermochemical Tables," J. Phys. Chem. Ref. Data (1978, 7, 793). 1978 Supplement
- Hurly, J.J., "Thermophysical Properties of Gaseous HBr and BCl3 from Speed-of-Sound Measurements," Int. J. Thermophys. (2000, 21/4).
- Stull, D.R., "Vapor Pressure of Pure Substances," Ind. Eng. Chem. (1947, 39, 517).
Footnote:
#RED is used for properties obtained from estimation methods.
*BLUE and †ORANGE are used to distinguish between differing data sets within a single column.
Contacts:
Keith Gillis
301-975-2468
keith.gillis@nist.gov
Michael Moldover
301-975-2459
michael.moldover@nist.gov
100 Bureau Drive, M/S 8360
Gaithersburg, MD 20899-8360
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