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Pressure and Vacuum Group
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Welcome
The Pressure and Vacuum group develops and disseminates the national measurement standards for pressure, vacuum, and low gas flow. The Group conducts research and participates in international intercomparisons to improve and validate these standards; develops physical models, obtains reference data, and conducts research to improve pressure and vacuum instruments and sensors, including piston gauges, liquid-column manometers, capacitance diaphragm gauges, spinning rotor gauges, ionization gauges, and calibrated gas leaks; and it assists users of such instruments by providing calibration services, participating in national intercomparisons, and producing assessments of measurement uncertainty. Programs/Projects
Accurate Flow Meter and Viscometer for Gases—Integrated circuits are made in reaction chambers, or process "tools", each of which receives gases from several mass flow controllers at rates which can be as small as 1 cubic centimeter … Vacuum Standards and Calibrations—Most calibrations of vacuum gauges are based on a known gas flow rate that is generated by one of two flow meters that operate at constant pressure. The "piston flow meter" generates a … Flow/Leak Standards and Calibrations—Leak artifacts are calibrated in the range 1 x 10-6 to 1 x 10-13 mol/s (2 x 10-2 to 2 x 10-9 std. cm3/s at 0 °C). The calibration can be performed directly against the NIST primary leak … Piston Gauge Standards and Calibrations—Piston gauges are used to calibrate customer piston gauges and pressure sensing devices. Piston gauges are calibrated via a direct comparison to another piston gauge via crossfloat; a … Low Pressure Manometry Standards and Calibrations— NIST has developed best-in-the-world primary standard pressure measurement capabilities for pressures spanning the range of 0.01 Pa to 360 kPa through the operation of four liquid-column … A Gas Pressure Scale Based on Primary Standard Piston Gauges—Accurate determinations of pressure are required for diverse applications such as the altitude of aircraft, barometric pressure for weather prediction, and process control in … Physical Properties of Liquid Precursors— In striving to adhere to Moore's Law, the semiconductor industry is designing and using new metal-organic compounds. Precursor compounds deliver a metal atom to the surface of a hot silicon … High-Stability Transfer Standard for the Barometric Pressure Range of 100 Pa to 130 kPa—NIST has developed a new pressure transfer standard capable of absolute-mode and differential-mode operation in the range of 100 Pa to 130 kPa. This important pressure range spans the barometric … Selected Publications
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Products and Services
Contact
Pressure and Vacuum Group: Gaithersburg, MD 20899-8364 |
