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Frontiers of Characterization and Metrology for Nanoelectronics

Purpose:

The 2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (formerly titled Characterization and Metrology for ULSI Technology) will be held March 25-28, 2013 at the National Institute of Standards and Technology (NIST), Gaithersburg, Maryland, USA. This conference, the ninth in the series, will focus on the frontiers and innovation in characterization and metrology of nanoelectronics.

The conference is sponsored by the National Institute of Standards and Technology, College of Nanoscale Science and Engineering, CEA-LETI, Semiconductor Research Corporation (SRC), International SEMATECH Manufacturing Initiative (ISMI), AVS, National Science Foundation (NSF), American Physical Society (APS), and IEEE/Electron Devices Society

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Committee Co-Chairs:

  • David Seiler, NIST
  • Alain Diebold, College of Nanoscale Science and Engineering, SUNY Albany
  • Bob McDonald, formerly of Intel (Treasurer)
  • George Thompson, Intel
  • Amal Chabli, LETI

Committee Members:

  • Luigi Colombo, TI
  • Michael Current, Current Scientific
  • Bob Havemann, SRC
  • Dick Hockett, Evans Analytical Group Ltd
  • Toshihiko Kanayama, AIST
  • David Kyser, Applied Materials
  • Patricia Lindley, Evans Analytical Group
  • Shifeng Lu, Micron
  • Zhiyong Ma, Intel
  • Ulrich Mantz, Zeiss
  • Lori S. Nye, Brewer Science, Inc.
  • Yaw Obeng, NIST
  • Lothar Pfitzner, Fraunhofer IISB
  • Erik Secula, NIST
  • Sandip Tiwari, Cornell University
  • Victor Vartanian, ISMI
  • Wilfried Vandervorst, IMEC
  • Usha Varshney, NSF
  • Ehrenfried Zschech, Fraunhofer Institute for Non-Destructive Testing

Testimonials:


"There were a total of 34 talks and 81 poster presentations that summarized major issues and provided critical reviews of crucial semiconductor developments and techniques needed as the industry evolves to silicon nanoelectronics and beyond."    

- Alex Braun, "A Jaunt Through Nanotechnopolis,"
Semiconductor International, May 20, 2009

 

"If you want to meet, greet, and learn from the world's experts in metrology, this is the place to be."    

- Dan Hutcheson, The Chip Insider,
January 11, 2007

Details:

Start Date: Monday, March 25, 2013
End Date: Thursday, March 28, 2013
Location: NIST, Gaithersburg, MD, USA
Audience: Industry, Government, Academia
Format: Conference

Sponsor(s):


Sponsors for the 2013 Conference

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Archives:

Publications and Talks from Past Conferences

Registration:

The registration fee for the conference includes coffee breaks, lunches, a reception, a banquet, a barbecue, and an extended abstract booklet with CD-ROM. The Early Bird registration fee is $450. Students may register for $250. Early Bird registration ends on Feb. 15, 2013!

Register On-line Now!

Please note, the above registration link is not a NIST website. NIST does not necessarily endorse the views expressed or the facts presented on this site outside of what pertains directly to the conference registration. Further, NIST does not endorse any commercial products that may be advertised or available on this site.

Accommodations:

A block of rooms is available at the Crowne Plaza Rockville. To receive the the special conference rate, please use the three-letter code FCM. You may book your reservations on-line or by calling 18002CROWNE.

Please note, the above registration link is not a NIST website. NIST does not necessarily endorse the views expressed or the facts presented on this site outside of what pertains directly to the conference registration. Further, NIST does not endorse any commercial products that may be advertised or available on this site.

Technical Contact:

David Seiler

Aerial view of NIST Gaithersburg campus buildings